Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges.
نام
Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges.
زبان اثر
انگلیسی
شناسگر
10.1007/s00158-011-0709-9 (شماره مدرک)
10.1007_s00158-012-0804-6 (importid)
ناشر
تاریخ انتشار
2012
قالب (کتاب)
کتاب